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List all 14 ETCH 17 CVD PVD RTP 1 FURNACE STEPPER TRACK 9 METROLOGY WET IMP 1 ETC

25031001. TEL Trias+

  • No:
    25031001
  • Category:
    CVD
  • Maker:
    TEL
  • Model:
    Trias+
  • Wafer Size:
    300
  • SN:
    J11069
  • Process:
    CVD
  • Config
    3x SPA chamber