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List all 14 ETCH 17 CVD PVD RTP 1 FURNACE STEPPER TRACK 9 METROLOGY WET IMP 1 ETC

4111001. NOVA NS3090

  • No:
    4111001
  • Category:
    Metrology
  • Maker:
    NOVA
  • Model:
    NS3090
  • Wafer Size:
    300
  • SN:
  • Process:
    Measurement
  • Config
    NS3090Next, Brooks EFEM